发明名称 POWER MOS TRANSISTOR HAVING TRENCH GATE
摘要 PROBLEM TO BE SOLVED: To provide a power MOS transistor having a trench gate of which gate breakdown voltage is satisfactory. SOLUTION: In a power MOS transistor at a peripheral end, where a gate electrode wiring layer 18 is drawn to a gate bus line, a trench 16a forming the gate electrode wiring layer 18 is formed, so that it is brought into contact with a field insulating film 14 and a gate-insulating film 17 continues to the field insulating film 14.
申请公布号 JP2001102572(A) 申请公布日期 2001.04.13
申请号 JP19990276129 申请日期 1999.09.29
申请人 TOYOTA AUTOM LOOM WORKS LTD 发明人 MORI SHOGO
分类号 H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L29/78
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