| 摘要 |
PROBLEM TO BE SOLVED: To enable a substrate treating system to be higher lessened in exclusive area than the conventional substrate treating systems which are provided with two tanks, one is a multi-functional tank where pure water and chemicals which are both kept at a temperature of 100 deg.C or below under a normal temperature are alternately substituted with each other, and the other is an exclusive chemical tank where chemicals are kept at a higher temperature than 100 deg.C. SOLUTION: Pure water and chemicals kept at 100 deg.C or higher are alternately supplied to a treating tank, the treating tank is housed in a chamber, and the inner pressure of the chamber is so regulated as to make the boiling point of pure water higher than the temperature of the chemicals, by which the chemicals can be substituted with pure water.
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