| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detector which attains improvement in defect detection output and reliability by highly accurately detecting various defects to occur on the surface of an inspection object. SOLUTION: A feature data merging means 108 merges feature data satisfying prescribed conditions into one piece of feature data (merges the feature data of plural close defects) concerning feature data (such as maximum value, minimum value and area value) for each of defective areas provided from image information (surface images of the inspection object). A sorting means sorts defect kinds on the basis of the maximum value, minimum value and area value of feature data merged by the feature data merging means 108. At such a time, the defect kinds are sorted especially not only on the basis of the levels of maximum and minimum values but also on the basis of the difference value of maximum and minimum values (amplitude of a defect signal). |
