| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration/angular velocity sensor using a piezoelectric vibration gyro which is compact, simple in structure and simple to manufacture, highly accurate and utilizes an energy-confined vibration mode. SOLUTION: A strip-shaped first electrode is set in a direction at right angles to an excitation direction to one of two positions separated via a predetermined distance in the excitation direction at a nearly central part of a primary face of a part polarized in a thickness direction of a piezoelectric plate. Moreover, strip-shaped second and third electrodes are formed extending via a distance in the direction at right angles to the excitation direction to the other position. A driving voltage for excitation is impressed between the first electrode and, the second and third electrodes, and electromotive forces corresponding to vibrations by a Coriolis force generated between the second and third electrodes are detected. A sum of the electromotive forces is detected as an acceleration, and a difference of the electromotive forces is detected as an angular velocity. The acceleration/angular velocity sensor is thus obtained with the utilization of a vibrational energy-confined mode between the first electrode and, the second and third electrodes. |
