| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing electronics grade oxygen or other ultrapure fluid from a standard grade supply. SOLUTION: Using two distillation columns of a high pressure column 111 and a low pressure column 103, first component is refined and collected from a multicomponent fluid containing the first component having concentration of at least 90 mol.%, at least one kind of light component having higher volatility than the first component, and at least one kind of heavy component having lower volatility than the first component. The high pressure column 111 and the low pressure column 103 are coupled thermally by condensing at least a part of steam from the high pressure column 111 in a reboiler-condenser 109 supplying at least a part of boiling heat for the low pressure column 103.
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