发明名称 ELECTROMAGNETIC MOTOR, AND VIBRATION ISOLATION DEVICE AND PROJECTION ALIGNER WITH ELECTROMAGNETIC MOTOR
摘要 PROBLEM TO BE SOLVED: To improve thrust by increasing magnetic flux without increasing the entire size of a device. SOLUTION: In the electromagnetic motor where first and second motors 10 and 20 with first, second, third, and fourth magnet units 1A, 1B, 1C, 1D, 2A, 2B, 2C, and 2D and annular coils 13a, 13b, 23a, and 23b that are wound so that the second and third magnet units 1B, 1C, 2B, and 2C can be covered are adjacent each other, an arrangement is made so that the polarity of the magnet of each of the magnet units 1A, 1B, 1C, and 1D of the first motor part 10 is opposite to that of the magnet of each of the magnet units 2A, 2B, 2C, and 2D of the corresponding second motor part 20. The electromagnetic motor allows eight magnets to be connected in series over the first motor 10 and the second motor 20 as a magnetic circuit, thus improving magnetic flux density.
申请公布号 JP2001103727(A) 申请公布日期 2001.04.13
申请号 JP19990274264 申请日期 1999.09.28
申请人 NIKON CORP 发明人 UDA YUTAKA
分类号 H01L21/027;F16F15/02;F16F15/03;G03F7/20;H02K33/18;H02K41/03;(IPC1-7):H02K41/03 主分类号 H01L21/027
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