| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a compact gas recovering apparatus which can recover effectively specified gas from mixed gas, with very high recovery, in a short time. SOLUTION: An SF6 gas adsorbing apparatus 3 and a nitrogen gas-adsorbing apparatus 4 are installed. Adsorbent which adsorbs SF6 gas easily is charged in the SF6 gas adsorbing apparatus 3, and adsorbent which adsorbs nitrogen gas easily is charged in the nitrogen gas adsorbing apparatus 4. A compressor 2b as a liquefying apparatus, a heat exchanger 6 and an SF6 tank 7 are connected with the SF6 gas adsorbing apparatus 3. A gas discharge apparatus 14 is connected with the nitrogen gas absorbing apparatus 4 via a vacuum pump 9b.</p> |
