Treating and/or processing disc-shaped substrates involves first rotating substrate in holder for initial treatment and/or rotating holder with substrate for subsequent treatment

摘要

The method involves first rotating the substrate (12) in a holder (34) for initial treatment and/or rotating the holder with the substrate for subsequent treatment. The substrate is rotated in the horizontal position and is cleaned. The substrate is processed on both sides simultaneously. The arrangement has a rotary table on a hollow shaft in a housing. Independent claims are also included for the following: an arrangement for implementing the method.