发明名称 CAPACITIVE PRESSURE SENSOR
摘要 A pressure transducer assembly includes a first body, a second body, a diaphragm, and an electrode. The diaphragm is mounted between the first and second bodies. The first body and the diaphragm form a first chamber. The second body and the diaphragm form a second chamber. The electrode is disposed in the first chamber. A capacitance between the electrode and the diaphragm is representative of a difference between the pressures in the first and second chambers. In some embodiments, the electrode is suspended from a hub and spoke mounting. In some embodiments the electrode is entirely metallic. In other embodiments, the electrode includes a ceramic disk with a conductive film formed on the disk and the disk is coupled to the housing with a ceramic rod. In some embodiments, the transducer also has a low thermal coefficient of expansion member connected to the housing for reducing warping in response to temperature changes.
申请公布号 WO0125742(A1) 申请公布日期 2001.04.12
申请号 WO2000US26696 申请日期 2000.09.28
申请人 MKS INSTRUMENTS, INC. 发明人 LUCAS, PAUL, D.
分类号 G01L9/12;G01L9/00;G01L19/04;G01L19/14;(IPC1-7):G01L19/04 主分类号 G01L9/12
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