发明名称 PIEZOELECTRIC / ELECTROSTRICTIVE DEVICE AND METHOD OF MANUFACTURE THEREOF
摘要 <p>A piezoelectric / electrostrictive device (10A) comprises a pair of opposed thin plates (16a,16b), a movable part (20), a fixed part (22) supporting the thin plates (16a,16b) and the movable part (20), a piezoelectric / electrostrictive element (24a,24b) attached to at least one of the thin plates (16a,16b), and a hole (12) defined by both inner walls of the thin plates (16a,16b), an inner wall (20a) of the movable part (20), and an inner wall (22a) of the fixed part (22). The thin plates (16a, 16b) are made of metal.</p>
申请公布号 WO2001026167(P1) 申请公布日期 2001.04.12
申请号 JP2000006747 申请日期 2000.09.29
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