摘要 |
<p>A piezoelectric / electrostrictive device (10A) comprises a pair of opposed thin plates (16a,16b), a movable part (20), a fixed part (22) supporting the thin plates (16a,16b) and the movable part (20), a piezoelectric / electrostrictive element (24a,24b) attached to at least one of the thin plates (16a,16b), and a hole (12) defined by both inner walls of the thin plates (16a,16b), an inner wall (20a) of the movable part (20), and an inner wall (22a) of the fixed part (22). The thin plates (16a, 16b) are made of metal.</p> |