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发明名称
Micromachined devices
摘要
申请公布号
GB2310951(B)
申请公布日期
2001.04.11
申请号
GB19960025722
申请日期
1996.12.11
申请人
* GEC-MARCONI LIMITED
发明人
NICHOLAS MARTYN * SHORROCKS;MARTIN JAMES * WALKER;RALPH * NICKLIN;ANDREW DUNCAN * PARSONS
分类号
H01L37/02;(IPC1-7):H01L21/30;G01J5/10
主分类号
H01L37/02
代理机构
代理人
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