DEVICE AND METHOD FOR CLEANING NOXIOUS GAS

摘要

A purifier of a noxious gas is provided with means for supplying a gas containing a noxious gas component, buffer means using a liquid which dissolves the noxious gas component in the supplied gas temporarily and later releases the dissolved noxious gas component, and means for purifying the noxious gas component in the gas supplied from the buffer means. The liquid in the buffer means dissolves the noxious gas component when the concentration of the noxious gas component in the supplied gas is high and releases the noxious gas component dissolved thus far when the concentration is low. When the noxious gas is ethylene oxide, water is used as the liquid. <IMAGE>