| 摘要 |
PROBLEM TO BE SOLVED: To obtain a corrosionproof member comprising a ceramic base with machined surface and fluorofilm coating at least on a part of the machined surface and designed to diminish its weight change due to corrosion and further suppress particle generation when exposed to a halogen-based corrosive gas. SOLUTION: This corrosionproof member is such one that the edges of particles exposed on the machined surface of the ceramic base are blunted on the exposed surface due to the mass transfer inside the particles, the fluorofilm is formed by direct contact of the machined surface with a fluorine compound, and the thickness of the film is 0.01-5.0μm.
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