| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump capable of restricting temperature rise of a rotary blade. SOLUTION: Heat transfer gas such as the He gas having high heat conductivity is led into a space S formed between a casing 11 and a spacer ring 11b, to which a fixed blade 11a is fixed, so as to lower the temperature of the fixed blade 11a and the spacer ring 11b. Radiation heat of the fixed blade 11a and a rotary blade 12a forming a turbine T becomes easy to be absorbed by the fixed blade 11a by lowering the temperature of the fixed blade 11a, and temperature of the rotary blade 12a becomes easy to be lowered.
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