发明名称 |
Method of forming mother for use in optical disc |
摘要 |
A photoresist is applied onto a substrate, the photoresist-coated substrate is exposed to a laser beam of 300 nm or less in wavelength to form a latent image indicative of an information signal, and the photoresist on the substrate is developed to form a pit/groove pattern indicating the information signal. The photoresist has a mean value of 0.1 or less between extinction coefficients before and after the exposure to the laser beam.
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申请公布号 |
US6214528(B1) |
申请公布日期 |
2001.04.10 |
申请号 |
US19980161670 |
申请日期 |
1998.09.29 |
申请人 |
SONY CORPORATION |
发明人 |
TAKEDA MINORU;YAMATSU HISAYUKI;FURUKI MOTOHIRO |
分类号 |
G03F7/022;G03F7/023;G11B7/26;(IPC1-7):G03F7/20 |
主分类号 |
G03F7/022 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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