发明名称 Method of forming mother for use in optical disc
摘要 A photoresist is applied onto a substrate, the photoresist-coated substrate is exposed to a laser beam of 300 nm or less in wavelength to form a latent image indicative of an information signal, and the photoresist on the substrate is developed to form a pit/groove pattern indicating the information signal. The photoresist has a mean value of 0.1 or less between extinction coefficients before and after the exposure to the laser beam.
申请公布号 US6214528(B1) 申请公布日期 2001.04.10
申请号 US19980161670 申请日期 1998.09.29
申请人 SONY CORPORATION 发明人 TAKEDA MINORU;YAMATSU HISAYUKI;FURUKI MOTOHIRO
分类号 G03F7/022;G03F7/023;G11B7/26;(IPC1-7):G03F7/20 主分类号 G03F7/022
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