| 摘要 |
An electrostatic chuck for clamping an electrically conducting workpiece includes an electrode that is incorporated between two insulating layers of an organic material, preferably polyimide, and that is mounted, with or without a coating, on a metallic pedestal. An insulating intermediate layer, for example, in the form of an intermediate ring having a thickness equal to or up to 10% greater than the thickness of the electrode, provided for eliminating a gap at the edge of the electrostatic chuck.
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