发明名称 |
Storage box for an object to be protected against physicochemical contamination |
摘要 |
The invention relates to a storage box for an object that is to be protected from physicochemical contamination. The storage box is intended to have low weight, good mechanical strength, a good electrical condition, with a low degassing rate in time with prevention of diffusion of gasses from the external atmosphere into the interior of the box. The inner and/or outer surface of the box's walls are coated with at least one protective layer. The box may be used to store silicon wafers.
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申请公布号 |
US6214425(B1) |
申请公布日期 |
2001.04.10 |
申请号 |
US19970860471 |
申请日期 |
1997.09.29 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;L'AIR LIQUIDE |
发明人 |
SPINELLI PHILIPPE;DOCHE CLAUDE;ROSTAING JEAN-CHRISTOPHE;COEURET FRANCOIS;SCOTTO D'APOLINIA SYLVAIN |
分类号 |
B65D85/86;H01L21/673;(IPC1-7):B05D3/04;B65D23/02;B65D23/08 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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