发明名称 Storage box for an object to be protected against physicochemical contamination
摘要 The invention relates to a storage box for an object that is to be protected from physicochemical contamination. The storage box is intended to have low weight, good mechanical strength, a good electrical condition, with a low degassing rate in time with prevention of diffusion of gasses from the external atmosphere into the interior of the box. The inner and/or outer surface of the box's walls are coated with at least one protective layer. The box may be used to store silicon wafers.
申请公布号 US6214425(B1) 申请公布日期 2001.04.10
申请号 US19970860471 申请日期 1997.09.29
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;L'AIR LIQUIDE 发明人 SPINELLI PHILIPPE;DOCHE CLAUDE;ROSTAING JEAN-CHRISTOPHE;COEURET FRANCOIS;SCOTTO D'APOLINIA SYLVAIN
分类号 B65D85/86;H01L21/673;(IPC1-7):B05D3/04;B65D23/02;B65D23/08 主分类号 B65D85/86
代理机构 代理人
主权项
地址