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发明名称
摘要
申请公布号
JP2001504998(A)
申请公布日期
2001.04.10
申请号
JP19980529434
申请日期
1998.04.27
申请人
发明人
分类号
H01L21/225;H01L21/28;H01L21/336;H01L21/8238;H01L27/092;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/225
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