| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device reduced in the quantity of a coating liquid to be used and capable of supplying the coating liquid to give an optional pattern such as circular form, elliptic form, polygonal form on a material to be treated. SOLUTION: The coating device A supplying the coating liquid to a film F of the flexible material to be treated is constituted of a sample table 10 holding the film F and having an endless groove 13 formed on the upper surface, a coating means 1 for discharging the coating liquid on the film F held on the sample table 10, a horizontal driving device for moving the coating means 1 relatively to the sample table 10 and a vacuum pump communicated with the endless groove 13 to suck the film F by the endless groove 13. |
