发明名称 QUARTZ GLASS CONTAINER AND METHOD FOR PRODUCING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a quartz glass container not eluting a metal impurity during use or not diffusing the metal impurity in a high-temperature environment and to provide a method for producing the quartz glass container. SOLUTION: This quartz glass container has arbitrary thickness (t) and <0.1 ppb concentration of Na, Mg, Al, K, Ca, Cr, Fe, Ni, Cu and Zn, respectively in the thickness range of 20μm from the surface and in the thickness range of 1/2t±10μm. The method for producing the quartz glass container comprises forming a container shape from a synthetic quartz glass block only by mechanical grinding without heat treatment.</p>
申请公布号 JP2001097734(A) 申请公布日期 2001.04.10
申请号 JP19990278812 申请日期 1999.09.30
申请人 TOSHIBA CERAMICS CO LTD 发明人 EZAKI MASANOBU
分类号 H01L21/683;C03B8/04;C03B19/10;C03B20/00;C03C3/06;H01L21/304;H01L21/306;(IPC1-7):C03C3/06 主分类号 H01L21/683
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