METHOD FOR MANUFACTURING ELASTIC ACOUSTIC WAVE DEVICE AND THE ELASTIC ACOUSTIC WAVE DEVICE

摘要

PURPOSE: A method for manufacturing an elastic acoustic wave device and the elastic acoustic wave device is provided to manufacture the elastic acoustic wave device having high quality factor(Q) and filtering regions of narrow-band and wide-band. CONSTITUTION: A silicon oxide(SiO2) film(4) having the first elastic impedance and thickness which is 0.12-0.13 times as large as elastic acoustic wave wavelength and a tungsten film(6) having the second elastic impedance larger than the first elastic impedance and thickness which is 0.2-0.3 times as large as elastic acoustic wave wavelength are laminated on a substrate alternatively to form an acoustic reflecting layer. The first conductor thin film is formed on the acoustic reflecting layer. A piezoelectric thin film(12) is formed on the first conductor thin film. The second conductor thin film is formed on the piezoelectric thin film.