| 摘要 |
PURPOSE: An apparatus for controlling a temperature of a process chamber is provided to eliminate an abnormal state caused by an abnormal temperature in a process chamber, by precisely detecting a difference of temperature values detected from the process chamber, and by outputting an alarming signal indicating that the abnormal state occurs in an internal temperature of the process chamber. CONSTITUTION: An apparatus for controlling a temperature of a process chamber has a temperature sensor(2) for preventing overheat, a temperature sensor(3) for detecting spark and a temperature sensor(1) for a paddle. The temperature sensor for preventing overheat detects a temperature, installed in the process chamber. An alarming unit calculates a difference between temperature values detected by the temperature sensor for detecting spark and the temperature sensor for the paddle, and outputs an alarming signal when the difference is higher than a predetermined level.
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