发明名称 METHOD FOR CORRECTING DEFECT OF SHADOW MASK AND DEVICE FOR THE SAME
摘要 PROBLEM TO BE SOLVED: To correct a defective opening of a shadow mask and to improve the yield. SOLUTION: The device of this invention comprises a horizontal fine deflecting circuit 17, a vertical fine deflecting circuit 18, and a cathode driver 16. A fine deflecting current in which bipolar pulse current is superimposed on a direct current is made to flow through a horizontal coil 8 and a vertical coil 15 of a deflecting yoke under the control of a control unit 1, a defective opening to which a foreign matter is attached is searched and detected, and pulse current of high energy is applied to the cathode of an electron gun by a cathode driver 16 to remove the foreign matter.
申请公布号 JP2001093421(A) 申请公布日期 2001.04.06
申请号 JP19990266670 申请日期 1999.09.21
申请人 HITACHI LTD 发明人 KARASAWA TAKUMI;TOMIYAMA KIYOTO
分类号 H01J9/50;(IPC1-7):H01J9/50 主分类号 H01J9/50
代理机构 代理人
主权项
地址