发明名称 SEMICONDUCTOR DEVICE, ITS MANUFACTURING METHOD CIRCUIT SUBSTRATE, AND ELECTRONIC EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device for reducing packaging volume and weight and for performing lamination arrangement with a semiconductor chip size, and the semiconductor device. SOLUTION: A first process for forming a pattern on a semiconductor chip, a second process for forming a hole on the semiconductor chip, a third process for providing a screening part on the inner wall surface of the hole, a fourth process for polishing a surface at the tip side of the hole in the semiconductor chip for setting the hole to a through-hole, and a fifth process for forming a conductive part on the inner wall surface of the through-hole are at least provided.
申请公布号 JP2001094044(A) 申请公布日期 2001.04.06
申请号 JP19990266146 申请日期 1999.09.20
申请人 SEIKO EPSON CORP 发明人 KAMISUKE SHINICHI
分类号 H01L25/18;H01L25/065;H01L25/07;H01L27/00;(IPC1-7):H01L25/065 主分类号 H01L25/18
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