| 摘要 |
PROBLEM TO BE SOLVED: To provide a flowrate sensor unit capable of reducing the generation of a flowrate measurement error based on the difference of individual sensor units. SOLUTION: A flowrate detector 5 including a heater and a temperature sensor is bonded to a heat transfer material 6, a fluid temperature detector 9 including a temperature sensor is contacted to a heat transfer material 10 and the flowrate detector 5, a fluid temperature detector 9 and parts of the heat transfer materials 6 and 10 are contained in a housing 2. In the housing 2, a memory 1 storing information on individual flowrate sensor units used for obtaining fluid flowrate by using the detection signal of a detection circuit comprising with the heater, the temperature sensor of the flowrate detector and the temperature sensor of the fluid temperature detector is contained. The flowrate detector 5, the fluid temperature detector 9 and the memory 1 are connected with a plurality of leads 4 in the housing 2. To the housing 2, a fluid flow path 13 is connected and the heat transfer material 6, 10 and the heat conduction materials 17 and 18 are extended into the flow path 13.
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