IMPLANTATION OF ION,申请号JP19900046551-传众专利搜索

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发明名称	IMPLANTATION OF ION
摘要
申请公布号	JPH03248422(A)	申请公布日期	1991.11.06
申请号	JP19900046551	申请日期	1990.02.26
申请人	NEC KANSAI LTD	发明人	FUKUSHIMA HIDEKI
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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