| 摘要 |
PROBLEM TO BE SOLVED: To prevent the situation where, when the amount of an exhausting gas within a heat treatment furnace increases, the temperature of the exhaust gas cannot be reduced sufficiently only with a quartz discharge pipe, the gas having a high temperature exceeding possible heat resistance level of the pipe will flow through the pipe, thus possibly damaging the pipe. SOLUTION: This heat treatment furnace has a furnace core made of a material having heat resistance, an exhaust pipe made of a material having heat resistance, and an exhaust piping which is connected to the exhaust pipe and which is made of a material having a heat resistance lower than that of the heat resistive material. A cooling pot is provided between the exhaust pipe and piping for cooling the temperature of an exhaust gas discharged from the furnace core via the exhaust pipe into the piping down to the heat resistance temperature of the exhausting pipe.
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