| 摘要 |
PURPOSE: A silicon implanter of a resin coater for fabricating a semiconductor is provided to implant the constant amount of silicon by controlling efficiently the implanting amount of silicon. CONSTITUTION: A silicon container(2) is coupled with one side of a housing(1) having a screw insertion hole(11) and a silicon implantation hole(12). A screw(3) is inserted into the screw insertion hole(11). An upper end of the screw(3) is connected with a bearing assembly body(4). A belt(51) is worn around the bearing assembly body(4). The belt(51) is connected with a motor(5). The housing(1) is located at a lower end of the screw(3). An insertion hole is connected wit a screw insertion hole(11). The insertion hole is formed in one side of the housing(1). An opening/shutting bar(6a) is formed in one end portion of the insertion hole. One side of a connection bar(9) is coupled with the other side of the opening/shutting bar(6a). The connection bar(9) is connected with an operating cylinder(7) by a coupling(8).
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