NEGATIVE TYPE RESIST COMPOSITION

摘要

PURPOSE: A negative type resist composition is provided to exhibit excellent pattern shape having low dependency of pattern size on post-exposure baking temperature and excellent sensitivity and resolution. CONSTITUTION: A negative type resist composition contains an alkali-soluble resin, an acid generating agent, a crosslinking agent and a basic compound of formula I wherein A is a divalent aliphatic hydrocarbon residue which may be interrupted by imino, a sulfide group or a disulfide group, X is N or C(NH2), and R1 and R2 are each H or alkyl.