| 摘要 |
PURPOSE: A cryogenic high vacuum pump is provided to lengthen a regeneration period and to prevent efficiency from being decreased, by sufficiently exhausting inner materials by active carbon of a cooling head, and by restoring most of a pumping capacity to a state before a pumping operation. CONSTITUTION: A cooling head has active carbon(15) and cooling pins in the periphery. A helium circulation system includes a helium line(17) installed around the active carbon. A low temperature heater is installed in the periphery of the active carbon. A portion of a wall of a cryogenic high vacuum pump is opened to be connected to a vacuum chamber through a valve, wherein the cryogenic high vacuum pump has a purging heater(27).
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