| 摘要 |
PROBLEM TO BE SOLVED: To improve, stabilize and uniformize the electron emission characteristic of a cold cathode electron emission element. SOLUTION: In a cold cathode electron emission element in which a carbon nano-tube 3 as an emitter is formed on the cathode surface, electrons are emitted from a plane perpendicular to an open end 2a at the tip of the carbon nano-tube 3, namely, the (0002) plane that is a side plane 2b for improving the electron emission characteristic. Forming of a BN layer 5 on the surface of the carbon nano-tube 3 prevents carbon from being evaporated from the tip of the carbon nano-tube or prevents impurities from bonded to the tip, therefore, the electron emission characteristic can be improved. The electron emission characteristic can be made uniform by loosening a bundle of the carbon nano- tube 3. |
