METHOD FOR MANUFACTURING CARBON NANO TUBE

摘要

PURPOSE: A method for manufacturing carbon nano tube is provided to grow carbon nano tube having a high formation density using plasma having a high density, and easily grow nano tube having a high formation density by using plasma having a high density, thereby finely refining and removing graphite or carbon lump. CONSTITUTION: The method for manufacturing carbon nano tube is characterized in that a carbon nano tube film is grown on a substrate (11) by using a 10¬11 cm¬-3 or more high density plasma chemical vapor deposition method. The method for manufacturing carbon nano tube comprises the steps of growing a carbon nano tube film having a certain thickness on a substrate (11) using vapor plasma; refining the carbon nano tube film using etching plasma (19); and repeating the steps of growing and refining the carbon nano tube film.