| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor sensor having stable vibrational characteristics and high detection accuracy, and its manufacturing method. SOLUTION: This semiconductor sensor comprises a movable part 40, supported on a substrate 10 via an insulating layer 20 and allowed to vibrate on the substrate, drive parts 50a, 42a, 50b, and 42b vibrating the movable part with an applied voltage, and a detection part having detecting electrodes 60a and 60b and detecting a displacement of the movable part in detection axis as a variation in electrostatic capacity. An area between the movable part and the substrate is maintained at a same potential, and an impedance between the movable part and the substrate is maintained at a prescribed high impedance. Thus, because a potential difference is not produced between the substrate and the movable part, an electrostatic attracting force is not produced therebetween, and the vibrational characteristics of the movable part are stabilized. In addition, because a current due to a voltage which is not applied to the drive parts does not affect the results of detection by the detection part, the detection accuracy of the sensor is increased. |
