发明名称 METHOD FOR DIE BONDING PRESSURE SENSOR CHIP
摘要 PROBLEM TO BE SOLVED: To provide a method for die bonding pressure sensor chip by which adherence between a pressure sensor chip and a body block can be improved, by easily uniformly applying an adhesive and performance deterioration or variation of a pressure sensor caused by the adhered state between the chip and block can be prevented. SOLUTION: In a method for die bonding pressure sensor chip in which a pressure sensor chip 1 is adhered to a body block 2 with an adhesive 3, the adhesive 3 is transferred to the adhesive surface 2b of the body block 2 by using an adhesive transfer pin 8 having a flat sharp end and, after the adhesive 3 closing the pressure introducing hole 2a of the adhesive surface 2b is removed by blowing air into the hole 2a, the pressure sensor chip 1 is mounted on and adhered to the adhesive surface 2b.
申请公布号 JP2001093919(A) 申请公布日期 2001.04.06
申请号 JP19990271177 申请日期 1999.09.24
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 INOUE TOMOHIRO;TAKAMI SHIGENARI;KANI MITSUHIRO;SAITO HIROSHI;SAKAI TAKAMASA
分类号 H01L21/52;G01L19/00 主分类号 H01L21/52
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