| 摘要 |
PURPOSE: A method for forming a pad window of a charge coupled device having a cell region and a pad region is provided to prevent the occurrence of a foreign matter on a metal pad or the corrosion of the metal pad. CONSTITUTION: In the method, the metal pad is formed with layers(21,22) in the pad region on a semiconductor substrate(20). The first protective layer(232) is then formed on the substrate(20) to cover the metal pad(21,22), and etched in part above the metal pad(21,22) to form a depressed portion on the metal pad(21,22). Next, a color filter is formed in the cell region, and the second protective layer(241) is formed on the substrate(20) including the cell region and the pad region. Thereafter, the depressed portion of the first protective layer(232) and an overlying portion of the second protective layer(241) are totally removed to form the pad window(W21) exposing the metal pad(21,22).
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