发明名称 SURFACE ACOUSTIC WAVE DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an SAW(surface acoustic wave) device having stable characteristic and a long life and its manufacturing method. SOLUTION: The line width W1 of the first metallic layer 6, which is positioned on the side of a piezoelectric substrate 2, of each electrode finger 5 of the comb-shaped electrodes 4 of exciting electrodes 3 is a value to be decided by the electrical characteristic of a surface acoustic wave device 1 and is a intrinsic value to be decided nearly uniquely in order to obtain a frequency characteristic requested on a prescribed piezoelectric substrate 2. The line width W2 of the second metallic layer 7 positioned on a remote side from the substrate 2 can optionally be set since it is independent from electric characteristic such as the frequency characteristic of the SAW device 1. The width W2 of the layer 7 is made larger than the width W1 of the layer 6 to improve the radiation effect of the device 1.
申请公布号 JP2001094383(A) 申请公布日期 2001.04.06
申请号 JP19990266369 申请日期 1999.09.20
申请人 TOSHIBA CORP 发明人 TAKAGI TOSHIYUKI
分类号 H01L21/302;H01L21/3065;H01L23/34;H01L23/48;H03H3/08;H03H9/145;(IPC1-7):H03H9/145;H01L21/306 主分类号 H01L21/302
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