| 摘要 |
PURPOSE: To facilitate handling of an electric connecting device itself when a different kind of substrate is inspected. CONSTITUTION: The electric connecting device 10 comprises more than one probe unit 32 fixed removably to the device body each comprising a probe base 56 fixed removably to the device body while extending in the longitudinal direction of a corresponding side, an origin mark 60 put at one end part of the probe base 56, a camera mounted on the probe base 56 to pick up the image of the origin mark 60 from a direction perpendicular to a substrate being inspected, and a plurality of probes mounted on the probe base 56. When the kind of a substrate being inspected is changed, the probe unit is replaced by one corresponding to the new substrate being inspected.
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