发明名称 |
PREPARATION OF PHENOLIC COMPOUND HAVING PROTECTED HYDROXY GROUP |
摘要 |
PROBLEM TO BE SOLVED: To provide a resin suitable for use in the formation of a radiation sensitive composition excellent in sensitivity in photolithography using far IR. SOLUTION: When a phenolic compound is reacted with an enol ether in the presence of an acid catalyst to prepare the objective phenolic compound having a protected hydroxy group, a hydrogen halide which is gaseous at ordinary temperature and pressure is used as the acid catalyst. |
申请公布号 |
JP2001092139(A) |
申请公布日期 |
2001.04.06 |
申请号 |
JP19990254114 |
申请日期 |
1999.09.08 |
申请人 |
SHIPLEY CO LLC |
发明人 |
SAKAKIBARA TOSHIAKI;NAKANO KOJI |
分类号 |
G03F7/039;C08F212/14;G03F7/023 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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