发明名称 PREPARATION OF PHENOLIC COMPOUND HAVING PROTECTED HYDROXY GROUP
摘要 PROBLEM TO BE SOLVED: To provide a resin suitable for use in the formation of a radiation sensitive composition excellent in sensitivity in photolithography using far IR. SOLUTION: When a phenolic compound is reacted with an enol ether in the presence of an acid catalyst to prepare the objective phenolic compound having a protected hydroxy group, a hydrogen halide which is gaseous at ordinary temperature and pressure is used as the acid catalyst.
申请公布号 JP2001092139(A) 申请公布日期 2001.04.06
申请号 JP19990254114 申请日期 1999.09.08
申请人 SHIPLEY CO LLC 发明人 SAKAKIBARA TOSHIAKI;NAKANO KOJI
分类号 G03F7/039;C08F212/14;G03F7/023 主分类号 G03F7/039
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