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发明名称
SEMICONDUCTOR DEVICE METHOD OF FORMING MARK FOR IDENTIFYING
摘要
申请公布号
JPH0429343(A)
申请公布日期
1992.01.31
申请号
JP19900134958
申请日期
1990.05.24
申请人
TOSHIBA CORP;TOUSHIBA MAIKURO EREKUTORONIKUSU KK
发明人
SHIRATA HITOSHI
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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