发明名称 BAKING ULTRAVIOLET LAMP SET
摘要 PURPOSE: A baking ultraviolet lamp set is to prevent damage of an air tube for supplying cooling air when a bulb is broken, thereby reducing maintaining cost of an equipment. CONSTITUTION: An ultraviolet lamp has a quartz bulb. The lamp is rotated by a rotational motor. An air tube(15) is disposed at a side portion of the bulb to supply cooling air to a surface of the bulb. The air tube is made of a metallic material. The metallic material is Mo. A screw portion(16) made of a metallic material is horizontally formed at an upper portion of the air tube. The air tube has a narrow end, which is horizontally curved to the bulb of the lamp. The nozzle-shaped narrow end of the air tube is to increase flow rate of the air supplied to the bulb, thereby improving cooling efficiency of the bulb. In this structure, although the bulb of quartz is broken, a broken piece of the bulb does not affect other components around the bulb.
申请公布号 KR20010029076(A) 申请公布日期 2001.04.06
申请号 KR19990041700 申请日期 1999.09.29
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, DONG SEON
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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