发明名称 APPARATUS FOR AUTOMATICALLY SUPPLYING SAMPLES FOR VACUUM EVAPORATOR
摘要 PURPOSE: An apparatus for automatically supplying samples for a vacuum evaporator is provided to obtain thin and thick films of high quality by supplying a certain amount of samples into a vacuum vessel for a long time. CONSTITUTION: The apparatus comprises a vessel shaped container in which a certain amount of sample can be put, a rotator, wherein the rotator is stuck to floor surface of the container (10), and a rotation axis (24) formed on lower part of the rotator is projected outside of the vacuum vessel (100) connecting to a driving means (25) controlled by a controller (23) so that a sample is discharged under the vacuum vessel (100), and a supply pipe which is installed by penetrating the floor surface of the vacuum vessel (100) so that the sample filled in the container (10) is supplied on an evaporation heater by rotation of the rotator in a vacuum vessel (100) in an apparatus for automatically supplying samples for a vacuum evaporator comprising a vacuum vessel (100) equipped with an evaporation heater (110) which evaporates supplied samples by heating.
申请公布号 KR20010027218(A) 申请公布日期 2001.04.06
申请号 KR19990038852 申请日期 1999.09.11
申请人 HAN VAC CO., LTD. 发明人 HUH, YUN SEONG;JUNG, WON HO;LEE, GEUM OK;OH, SE HU;SON, JAE IL
分类号 C23C14/24;(IPC1-7):C23C14/24 主分类号 C23C14/24
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