| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature controlling method for a furnace body, etc., and capable of controlling outputs from plural heaters and regulating temperature in the furnace body to a uniform temperature by a temperature sensor arranged in the vicinity of a reference heater of plural heaters arranged in the furnace body, and to provide a device provided with the furnace body, etc. SOLUTION: In this temperature controlling method and this device provided with the furnace body, etc., the inside of the furnace body 10 is heated at an optional set temperature by controlling outputs from plural heaters including reference heaters 1 to 3 arranged in the furnace body 10, the temperature differences of intra-furnace temperature distribution sensors 6 to 8 arranged in the furnace body are controlled so as to be included within the fixed range of the set temperature and respective outputs from the heaters are stored in a non-volatile memory 12 for a microcomputer 11. Then, a sample is charged into the furnace body 10, the temperature of the sample is measured by a calibration temperature sensor, a temperature difference between the set temperature and the temperature measured by the calibration temperature sensor is stored in the memory 12 as a calibration value and the outputs of plural heaters are controlled by a temperature sensor 4 arranged in the vicinity of the reference heater in the furnace body 10 on the basis of the values stored in the memory 12 so as to be at a temperature obtained by adding the calibration value to the set temperature.
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