| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspecting apparatus controllable so that the temperature of a DUT is expected value. SOLUTION: The apparatus comprises a DUT having means for self-heating according to an external control signal pattern, a sensor for directly monitoring the temperature of the DUT and means for generating the control signal pattern so that the temperature of the DUT coincides with an expected value, based on the output of the sensor, thus making the DUT temperature controllable.
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