| 摘要 |
PURPOSE: A polymer having oxygen-substituted vinylphenol unit is provided to obtain excellent resolving power, or the like, when used for a resin component of a resist composition, and good results in sensitivity, residual ratio, or the like. CONSTITUTION: A polymer is obtained by making the polymer contain an O-substituted vinylphenol unit of formula I wherein R1, R2 and R3 are each a (substituted) 1-4C alkyl, a (substituted) 2-9C alkylene which is formed by linking R1 with R2, R1 with R3, or R2 with R3, or a (substituted) 2-9C alkylene which is formed in such a case that R2 is methylidyne, one of bond lines of the methylidyne links to R1, and another bond line links to R3. The unit of formula I can be expressed, for example, by formula II when R1 and R2 in formula I link together to form the alkylene, by formula III when R1 and R3 link together to form the alkylene, by formula IV when R2 and R3 link together to form the alkylene, and by formula V when R2 is methylidyne, one of bond lines of the methylidyne links to R1 and another bond line links to R3.
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