发明名称 EQUIPMENT AND METHOD FOR CHECKING PROCESS FLOW AND COMPUTER READABLE RECORDING MEDIUM STORED WITH PROCESS FLOW CHECKING PROGRAM
摘要 <p>PROBLEM TO BE SOLVED: To provide a process flow checking equipment which can express a flexible checking rule for a process flow. SOLUTION: A process flow check equipment comprises at least a process controlling section 1 including a single process pattern preparation means 4 for preparing a single process pattern which defines a pattern for each process, a process pattern preparation section 5 for preparing a process pattern consisting of an arrangement of single process patterns which should not exist in a process flow and an arrangement of single process patterns which should exist in the process flow, a process pattern checking section 6 for checking whether there are process patterns in conformity with the process flow, and an in-check data controlling section 7 for controlling the in-check data based on the checking result of the process pattern checking section. By preparing the pattern for each process and preparing the arrangement of single process patterns and then using the single process patterns and the process pattern as a checking rule, a flexible checking rule can be expressed.</p>
申请公布号 JP2001093793(A) 申请公布日期 2001.04.06
申请号 JP19990271273 申请日期 1999.09.24
申请人 TOSHIBA CORP 发明人 SATOGUCHI YUUICHI
分类号 H01L21/02;G05B19/418;G06Q50/00;G06Q50/04;(IPC1-7):H01L21/02;G06F17/60 主分类号 H01L21/02
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