METHOD OF FABRICATING HIGH-DENSITY LED ARRAY

摘要

PURPOSE: A method of fabricating a high-density LED array is to realize the LED array having a hetero-junction structure, thereby improving luminous efficiency and luminance of the LED array. CONSTITUTION: The second layer having the second lattice constant is formed on the first layer having the first lattice constant. The third layer having the third lattice constant is formed on the second layer to form a hetero-junction structure. A part of the third layer is etched to form the first insulating groove(4) for exposing an upper face of the first layer. The first insulating groove is filled with an insulating material. The hetero-junction structure is divided into an electrode portion and a luminous portion based on the first insulating groove. An insulating layer(7) is formed on the third layer and the first insulating groove. Then, the insulating layer on the third layer is partially removed corresponding to the luminous portion to form the second insulating groove(9). An etching process is performed to expose an upper face of the first layer to form the plurality of insulating grooves, thereby dividing the luminous portion into a plurality of unit illuminant sources.