| 摘要 |
PROBLEM TO BE SOLVED: To prevent ion flux blown off from a plasma generating space to a plasma-treating space from being interrupted, and to prevent particles from being generated due to the repetition of thermal expansion and contraction, and to prevent mechanical durability from deteriorating by dispensing it to provide a rib-shaped gas supply passage crossing the plasma-generating space for supplying reaction gas to each blowoff port of an anode formed like a concentric circle. SOLUTION: Reaction gas to be introduced to a plasma-treating space 2 is supplied from a gas bank groove 5 formed at the upper part of a plasma- generating space, through a supply tube arranged in a plasma generating chamber 3 to a supply port 14 formed at each anode 4. |
