| 摘要 |
PROBLEM TO BE SOLVED: To decrease the footprints of a treating device which continuously executes plural treating stages. SOLUTION: This device is provided with plural treating vessels (A1), (A2), (A3), (B1), (B2) and (B3) which accept substrates (1) therein and subject the substrates to various kinds of treatment. The treating vessels are dispersed to respective treating vessel groups (A) and (B) and are arrayed in three stages in such a manner that the continuous treatments are executed in the treating vessels of the opposite treating vessel groups (A) and (B). Transporting vessels (C) having transporting vessels (C1), (C2) and (C3) are parallel movably disposed between the treating vessel groups (A) and (B). The treating vessels and transporting vessel described above are internally provided with rollers (7),..., (11)... in such a manner that the substrates (1) are made to travel leftward or rightward. The substrates (1) taken out of a loader cassette (2) are alternately transported to the treating vessel group (A) and the treating vessel group (B), are subjected to various kinds of the treatments and are housed into an underloader cassette (3).
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