| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-speed, high-acceleration and long-service life XY stage mechanism allowing easy provision of a carrying system or measurement system and capable of maintaining high accuracy over a long period, and provide an exposing device using it. SOLUTION: This XY stage mechanism has a Y slide shaft 2 penetrating only one side face of a vacuum chamber 1, retaining a stage base plate in a cantilever state; a Y air slide bearing 4 as a guide; a first air slide bearing 6 supporting an X air slide plate 5 in a non-contact state; a coupling part 8; and a second X air slide bearing 9 as a guide. The stage is driven with the Y slide shaft 2, the X air slide plate 5 and the coupling part 8 floated.
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