| 摘要 |
PURPOSE: A gas detection sensor is provided to improve sensitivity, by making only designated gas pass through a catalyst metal gate in a passivation layer of the sensor. CONSTITUTION: An insulation layer is disposed on a semiconductor substrate(10). A catalyst metal gate layer(30) is disposed on the insulation layer. The passivation layer(40) includes a material protecting the catalyst metal gate layer from corrosive gas, interference of at least one foreign substance and water, disposed on the catalyst metal gate layer. The passivation layer changes at least one chemical and physical surface characteristic of the sensor(1). The gas detection sensor reduces passing-through of at least one of gas, water and a foreign substance except the designated gas which interacts with the catalyst metal gate layer.
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